Tried this simple Michelson interferometer for measuring the error of a 100mm translation stage yesterday. The interferometer and stage are mounted to the same optical table, but there's still a fair amount of vibration of the measurement corner-cube which causes instability in the signal when the stage is not moving.

Some sample data here: interf_data. One channel is an encoder signal from the motor which should come every 5 um, the other channel is the interferometer output. Analysis will follow...